Current position: Home >> Scientific Research >> Patents

一种楔形基片研磨装置及其工作方法

Hits:

First Author:Renke Kang

Disigner of the Invention:zhuxianglong,李彧,Dong Zhigang,Shang GAO,Harry,jinzhuji

Affilication of Author(s):机械工程学院

Application Number:CN109159019A

Authorization number:CN201811142042.3

Pre One:超精密低损伤磨削硅片的软磨料砂轮

Next One:一种基片均匀抛光装置及其工作方法
Recommended Ph.D.Supervisor Recommended MA Supervisor Institutional Repository Personal Page

Address: No.2 Linggong Road, Ganjingzi District, Dalian City, Liaoning Province, P.R.C., 116024

Click : times
  • MOBILE Version
    •
    Open time:..
    The Last Update Time:..

    Mobile phone sweep