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超精密低损伤磨削硅片的软磨料砂轮

Release Time:2022-10-19  Hits:

First Author: Renke Kang

Disigner of the Invention: Shang GAO,Dongming Guo,金洙吉,赵海轩

Institution: 机械工程学院

Application Number: CN101780662A

Authorization Number: CN201010128957.6

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