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超精密低损伤磨削硅片的软磨料砂轮

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First Author:Renke Kang

Disigner of the Invention:Shang GAO,Dongming Guo,jinzhuji,赵海轩

Affilication of Author(s):机械工程学院

Application Number:CN101780662A

Authorization number:CN201010128957.6

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