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论文类型： 期刊论文

发表时间： 2010-08-15

发表刊物： JOURNAL OF APPLIED PHYSICS

收录刊物： SCIE、EI

卷号： 108

期号： 4

ISSN号： 0021-8979

摘要： A two-dimensional fluid model was built to study the argon discharge in a capacitively coupled plasma reactor and the full set of Maxwell equations is included in the model to understand the electromagnetic effect in the capacitive discharge. Two electrical sources are applied to the top and bottom electrodes in our simulations and the phase-shift effect is focused on. We distinguish the difference of the phase-shift effect on the plasma uniformity in the traditional radio frequency discharge and in the very high frequency discharge where the standing wave effect dominates. It is found that in the discharges with frequency 13.56 MHz, the control of phase difference can less the influence of the electrostatic edge effect, and it gets. the best radial uniformity of plasma density at the phase difference pi. But in the very high frequency discharges, the standing wave effect plays an important role. The standing wave effect can be counteracted at the phase difference 0, and be enhanced at the phase difference pi. The standing wave effect and the edge effect are balanced at some phase-shift value between 0 and pi, which is determined by discharge parameters. (C) 2010 American Institute of Physics. [doi:10.1063/1.3475376]