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论文类型： 期刊论文

发表时间： 2010-03-01

发表刊物： PHYSICS OF PLASMAS

收录刊物： SCIE、EI

卷号： 17

期号： 3

ISSN号： 1070-664X

摘要： One-dimensional self-consistent fluid model is used to simulate the capacitively coupled argon plasma, in which the metastable effect on the plasma parameters at different discharge conditions is investigated. The results show that due to the metastable atom existence, the bulk plasma density drops significantly, especially at high pressures, high voltages, and high frequencies, accompanied by the decrease in electron temperature in the bulk. When the pressure and voltage are high, the metastable atom density is characterized by a saddle distribution in the axis direction. However, with the decrease in voltage and pressure, the metastable atom density becomes a parabolic distribution. Besides, the curve of plasma density with frequency has a minimum, and so is the profile of metastable atom density. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3368862]