location: Current position: Home >> Scientific Research >> Paper Publications

Experimental investigations of the plasma radial uniformity in single and dualfrequency capacitively coupled argon discharges

Hits:

Indexed by:期刊论文

Date of Publication:2016-01-01

Journal:Phys. Plasmas

Volume:23

Issue:12

Page Number:123512-123512

Pre One:Determination of neutral temperature using fiber Bragg grating sensor in capacitively coupled argon plasmas

Next One:Discontinuity of mode transition and hysteresis in hydrogen inductively coupled plasma via a fluid model