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Indexed by:期刊论文

Date of Publication:2016-03-21

Journal:JOURNAL OF APPLIED PHYSICS

Included Journals:SCIE、EI、Scopus

Volume:119

Issue:11

ISSN No.:0021-8979

Abstract:Neutral temperature T-g in capacitively coupled argon plasmas was measured by using a fiber Bragg grating sensor. The measurement of T-g is based on the thermal equilibrium process between the sensor and neutral gases, which is found to become fast upon increasing pressure, due to enhanced heat conduction. Additionally, T-g was found to increase with increasing high frequency power due to enhancive collisions with charged particles. It is also observed that T-g exhibits a significant gradient in space, ranging from 10 to 120 degrees C higher than room temperature for the conditions investigated. In addition, the spatial profiles of T-g at different pressures generally resemble those of the Ar+ density n(i), measured with a floating double probe. The neutral gas is mainly heated via elastic collisions with ions in the sheath region followed by heat conduction among neutrals. (C) 2016 AIP Publishing LLC.