Release Time:2019-03-13  Hits:

Indexed by: Journal Article

Date of Publication: 2016-03-21

Journal: JOURNAL OF APPLIED PHYSICS

Included Journals: Scopus、EI、SCIE

Volume: 119

Issue: 11

ISSN: 0021-8979

Abstract: Neutral temperature T-g in capacitively coupled argon plasmas was measured by using a fiber Bragg grating sensor. The measurement of T-g is based on the thermal equilibrium process between the sensor and neutral gases, which is found to become fast upon increasing pressure, due to enhanced heat conduction. Additionally, T-g was found to increase with increasing high frequency power due to enhancive collisions with charged particles. It is also observed that T-g exhibits a significant gradient in space, ranging from 10 to 120 degrees C higher than room temperature for the conditions investigated. In addition, the spatial profiles of T-g at different pressures generally resemble those of the Ar+ density n(i), measured with a floating double probe. The neutral gas is mainly heated via elastic collisions with ions in the sheath region followed by heat conduction among neutrals. (C) 2016 AIP Publishing LLC.