Release Time:2019-03-09  Hits:

Indexed by: Journal Article

Date of Publication: 2012-07-01

Journal: CHINESE PHYSICS B

Included Journals: Scopus、ISTIC、EI、SCIE

Volume: 21

Issue: 7

ISSN: 1674-1056

Key Words: mode transition; inductively coupled plasma; Langmuir probe; ICCD

Abstract: A Langmuir probe and an ICCD are employed to study the discharge mode transition in Ar inductively coupled plasma. Electron density and plasma emission intensity are measured during the E (capacitive discharge) to H (inductive discharge) mode transitions at different pressures. It is found that plasma exists with a low electron density and a weak emission intensity in the E mode, while it has a high electron density and a strong emission intensity in the H mode. Meanwhile, the plasma emission intensity spatial (2D image) profile is symmetrical in the H mode, but the 2D image is an asymmetric profile in the E mode. Moreover, the electron density and emission intensity jump up discontinuously at high pressure, but increase almost continuously at the E to H mode transition under low pressure.