Current position: Home >> Scientific Research >> Patents

一种体产生负氢离子机制的等离子体腔室

Hits:

First Author:Fei Gao

Disigner of the Invention:wangyounian

Application Number:CN201410666230.1

Authorization Date:2014-11-20

Authorization number:CN104378904A

Pre One:一种细长管射频感应耦合等离子体源反应器

Next One:一种减少基片材料受高能离子轰击损伤的方法