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高飞
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教授
博士生导师
硕士生导师
- 主要任职：物理学院副院长
- 性别：男
- 毕业院校：大连理工大学
- 学位：博士
- 所在单位：物理学院
- 学科：等离子体物理
- 电子邮箱：fgao@dlut.edu.cn
访问量：
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[61] Liu, Jia, Yong-Xin, Gao, Fei, Wang, You-Nian, Zhang, Quan-Zhi, J (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China..Measurements of ion energy distributions in a dual-frequency capacitively coupled plasma for Ar/O-[J],JOURNAL OF PHYSICS D-APPLIED PHYSICS,2013,46(23)
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[62] Zhao, Shu-Xia, Gao, Fei, Wang, You-Nian, Bogaerts, Annemie, SX (reprint author), Univ Antwerp, Dept Chem, Res Grp PLASMANT, Univ Pl 1, B-2610 Antwerp, Belgium..Gas ratio effects on the Si etch rate and profile uniformity in an inductively coupled Ar/CF4 plas[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2013,22(1)
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[63] 刘永新, 高飞, 陆文琪, 王友年.Experimental and numerical investigations of electron density[J],J. Vac. Sci. Technol. A,2013,31(6):61308-61308
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[64] 高飞, 赵书霞, 李雪春, 王友年.Mode transition in CF41 Ar inductively coupled plasma[J],PHYSICS OF PLASMAS,2013,20(12):123513-123513
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[65] Gao, Fei, Li, Xue-Chun, Zhao, Shu-Xia, Wang, You-Nian, YN (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China..Spatial variation behaviors of argon inductively coupled plasma during discharge mode transition[J],CHINESE PHYSICS B,2012,21(7)
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[66] Zhao, Shu-Xia, Gao, Fei, Wang, You-Nian, Bogaerts, Annemie, SX (reprint author), Univ Antwerp, Dept Chem, Res Grp PLASMANT, Univ Pl 1, B-2610 Antwerp, Belgium..The effect of F-2 attachment by low-energy electrons on the electron behaviour in an Ar/CF4 induct[J],PLASMA SOURCES SCIENCE & TECHNOLOGY,2012,21(2)
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[67] Jiang, Xiang-Zhan, Liu, Yong-Xin, Lu, Wen-Qi, Bi, Zhen-Hua, Gao, Fei, Wang, You-Nian, YN (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China..Influence of dual-frequency source powers on ion density and electron temperature in capacitively-[J],18th International Vacuum Congress (IVC)/International Conference on
Nanoscience and Technology (ICNT)/14th International Conference on
Surfaces Science (ICSS)/Vacuum and Surface Sciences Conference of Asia
and Australia (VASSCAA),2012,86(7,SI):881-884
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[68] 高飞, 赵书霞, 王友年.射频感性耦合等离子体放电模式跳变及回滞的实验研究[A],2011,186-186
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[69] Gao, Fei, Zhao, Shu-Xia, Li, Xiao-Song, Wang, You-Nian, F (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China..Effects of matching network on the hysteresis during E and H mode transitions in argon inductively[J],PHYSICS OF PLASMAS,2010,17(10)
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[70] Gao, Fei, Zhao, Shu-Xia, Li, Xiao-Song, Wang, You-Nian, F (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Peoples R China..Comparison between experiment and simulation for argon inductively coupled plasma[J],PHYSICS OF PLASMAS,2009,16(11):113502
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[71] 高飞, 王友年.射频感应耦合Ar-CF_4等离子体物理特性的Langmuir探针测量[A],2009,1
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[72] Gao Fei, 毛明, Ding Zhen-Feng, 王友年, Gao, F (reprint author), Dalian Univ Technol, Sch Phys & Optoelect Technol, State Key Lab Mat Modificat Laser Ion & Elect Bea, Dalian 116024, Peoples R China..射频感应耦合Ar-N2等离子体物理特性的Langmuir探针测量及理论研究[J],物理学报,2008,57(8):5123-5129
