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单晶硅氧化工艺模拟力场开发

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Leading Scientist:高宇飞

Project Participants:Xiaoliang Zhang

Supported by:企事业单位委托科技项目

Status:结题

Supported by:哈尔滨工业大学

Nature of Project:横向

Date of Project Approval:2021-12-02

Scheduled completion time:2022-07-31

Date of Project Initiation:2021-12-02

Date of Project Completion:2023-07-24

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