Release Time:2024-05-25 Hits:
Indexed by: Journal Papers
Document Code: 374068
Date of Publication: 2023-07-01
Journal: JOURNAL OF MANUFACTURING SCIENCE AND ENGINEERING-TRANSACTIONS OF THE ASME
Volume: 145
Issue: 7
ISSN: 1087-1357
Key Words: ALGORITHMS; FILMS; FRICTION; MOLECULAR-DYNAMICS; PLANARIZATION; POLISHING TECHNIQUE; REACTIVE FORCE-FIELD; SINGLE-CRYSTAL DIAMOND; SURFACE; WEAR