Atomistic understanding of rough surface on the interfacial friction behavior during the chemical mechanical polishing process of diamond
Release Time:2026-03-29 Hits:
Indexed by: Journal Papers
Document Code: 479073
Date of Publication: 2024-06-11
Journal: FRICTION
Volume: 12
Issue: SI
Page Number: 1119-1132
ISSN: 2223-7690
Key Words: ALGORITHMS; FLOW; REACTIVE MOLECULAR-DYNAMICS; SIMULATION
CN: 10-1237/TH